Wafer heating, very high temperature

Ultra-high temperature bidirectional hot plate lineup with maximum temperature up to 1000℃

Main applications

It is ideal for wafer heating, baking and evaluation of materials. Compared to air heating, it uses heat conduction with the hot plate, so it is possible to heat treat and bake quickly and in a short time. It is available in two sizes, 85mm and 200mm, with maximum temperatures of 850℃ and 1000℃. A quartz bell jar is also available as an option, so it can also be used for gas replacement heating of materials.

MSA FACTORY HEATING KNOW-HOW

We combine various expertise in materials (super heat-resistant plates, heat distortion countermeasures, titanium chassis) heater design, thermal insulation, thermal radiation, etc.

High-performance, multi-function temperature controller

THE TOUCH PANEL TYPE TEMPERATURE CONTROLLER (PCC118-W-TP) HAS VARIOUS FUNCTIONS SUCH AS SAFETY MONITORING AND TEMPERATURE DATA ACQUISITION AS WELL AS HIGH PRECISION TEMPERATURE CONTROL.

safety

THE CONTROLLER (PCC118-W-TP) IS EQUIPPED WITH SAFETY FUNCTIONS THAT INCLUDE AN OVER-TEMPERATURE MONITORING FUNCTION, EMERGENCY STOP FUNCTION, LEAKAGE CURRENT DETECTION FUNCTION, AND LOAD DISCONNECTION FUNCTION.

 

The lower hot plate can be pulled out toward the front.

 

Quartz glass bell jar: A workpiece is placed in a quartz glass bell jar, gas displacement is performed, and heating is possible.

List of models

model number
RP8008
RP8020
RP10008
RP10020
Max. temperature
850℃ 1000℃
Plate size
80 x 80mm 220 x 220mm 80 x 80mm 220 x 220mm
Plate Material
Super heat-resistant alloys
Supply voltage
AC100V AC200V
option
Quartz glass bell jar,
Inert gas atmosphere,
Bell jar handling jig
Applicable Temperature
Controller
PCC100G, PCC118-W-TP
forte
Double-sided heating hot plate structure
Fast heating to high temperature
Ultra-high temperatures up to 1000°C,
Quartz glass, heating in inert atmosphere

Download Materials