Hot Chuck for Film Porous Ceramic Chuck
PA-FC, PC-WPFC series

Film chuck (-FC) with waterproof function (-WPFC) Lineup Maximum temperature 200°C

Main applications

For heating process of films, thin glass substrates, etc., up to 200°C.

Adsorption function by porous ceramic / Porous chuck method

Because the workpiece is adsorbed by porous ceramic, the diameter of the through-holes (adsorption holes) does not affect the workpiece. Thin film-like workpieces can be heated uniformly without deformation.

WATERPROOF FUNCTION ALSO AVAILABLE -WPFC SERIES

Thanks to its waterproof function, this hot plate can also be used for processes such as heating + spray coating.

Digital Temperature Controller

Connects to MSA FACTORY standard temperature controllers with a one-touch connector. PCC100_SG

Vacuum pump for adsorption

A small diaphragm pump provides powerful suction (chucking). Sold in a configuration with pump.

 

List of models

model number
PA2012-FC
PA2020-FC
PA2012-WPFC
PA2020-WPFC
PA2045-FC
Max. temperature
200℃ 200℃ 200℃ 200℃ 200℃
Plate
Size
□120mm □200mm □120mm □200mm 450 x 300mm
Plate Material
Porous ceramic (alumina), porous chuck
Supply voltage
AC100V
option
Vacuum pump for suction, with fittings
Applicable Temperature
Controller
PCC100G, PCC107Co
forte
Porous Ceramic Adsorption Hot Chuck
Porous Ceramic Adsorption Hot Chuck
Waterproof type
Porous
Ceramic
Adsorption Hot
Chuck
Price (excluding tax.)
Controller
Set price)
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