θ rotation stage
Wafer-compatible θ rotation stage
MULTI-AXIS CONFIGURATION MSA-MULTI-STAGE
MSA MULTI-STAGE (MULTI-AXIS CUSTOMIZED) STAGES COMBINED WITH OTHER AXIS-DRIVEN STAGES, WE CAN PREPARE A STAGE TO SUIT YOUR APPLICATION.
Model List MSS Series (θ rotation)
model number |
MSS175 |
MSS225 |
MSS250 |
MSS300 |
|---|---|---|---|---|
Stage Size |
175mm dia. | 225mm dia. | 250mm dia. | 300mm dia. |
Target wafer size |
6/5/4" | 8/6/5" | 8/6/4" | 12/8/6" |
standard specification |
Wafer Tweezers Nige | |||
stroke |
Unlimited 360° | |||
Plate and
|
Plate: Aluminum / Drive unit: Iron, stainless steel, etc. | |||
weight |
Approx. 1kg | Approximately 1.5kg | Approx. 2.0kg | Approx. 2.6kg |
Price (excluding tax) |
- | - | - | - |
Standard delivery date |
10-20 days | |||
DRAWING (PDF) |
MSS175 | MSS225 | MSS250 | MSS300 |
