θ回転ステージ
ウエハ対応θ回転ステージ
MULTI-AXIS CONFIGURATION MSA-MULTI-STAGE
MSA MULTI-STAGE (MULTI-AXIS CUSTOMIZED) STAGES COMBINED WITH OTHER AXIS-DRIVEN STAGES, WE CAN PREPARE A STAGE TO SUIT YOUR APPLICATION.
機種一覧 MSSシリーズ （θ回転）
model number |
MSS175 |
MSS225 |
MSS250 |
MSS300 |
|---|---|---|---|---|
Stage Size |
φ175mm | φ225ｍｍ | φ250ｍｍ | φ300mm |
対象ウエハサイズ |
6/5/4” | 8/6/5” | 8/6/4” | 12/8/6” |
標準仕様 |
ウエハピンセットニゲ | |||
stroke |
無制限 360° | |||
Plate and
|
Plate: Aluminum / Drive unit: Iron, stainless steel, etc. | |||
weight |
Approx. 1kg | Approximately 1.5kg | 約2.0kg | Approx. 2.6kg |
Price (excluding tax) |
- | - | - | - |
Standard delivery date |
10-20日 | |||
DRAWING (PDF) |
MSS175 | MSS225 | MSS250 | MSS300 |
