Ultra-high temperature Covered hot plate Lineup up to 1000°C

Main applications

PA-CC series (safety cover), wafer heating (RP series), and PA-LIF series (with lifter) for large substrate and glass heating, material table research and evaluation, inorganic material heat treatment, heat resistance evaluation, baking, etc. The RP series also includes double-sided heating and quartz bell jar. The RP series is also available as an option for gas displacement heating of materials.

MSA FACTORY HEATING KNOW-HOW

We combine various expertise in materials (super heat-resistant plates, heat distortion countermeasures, titanium chassis) heater design, thermal insulation, thermal radiation, thermal simulation, etc.

High performance and multifunctional

Customized lifter function (vertical substrate drive) for heating and transporting large substrates, vacuum chuck function for handling warped substrates during heating, etc. can be added.

safety

The controller is equipped with safety functions that include an over-temperature monitoring function, an emergency stop function, a leakage current detection function, and a load disconnection function.

model number	PA4040-SC	PA8010-SC	RP10008	RP10020
Max. temperature	400℃	800℃	1000℃	1000℃
Plate size	400 x 200mm	100 x 100mm	80 x 80mm	220 x 220mm
Plate Material	aluminum alloy	Super heat-resistant alloys
Supply voltage	AC200V	AC100V	AC200V
option	Electric Lifter, Vacuum suction	Electric lifter, Vacuum suction, Motorized transfer surface Shutter	Electric Lifter	Double-sided heating function
Applicable Temperature Controller	PCC100G, ETC.	PCC100G, ETC.	PCC118-W-TP
forte	Manual Insulated Cover Included, others are automatically operated The other can be handled in	Conveyor section, side exit, Transport robot compatible type	Supports ultra-high temperatures up to 1000℃, heating in an inert atmosphere of quartz glass
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