Ultra-high temperature Covered hot plate Lineup up to 1000°C

Main applications

大型基板、ガラス加熱用　カバー付きホットプレート　PA-CCシリーズ（安全カバー）の他、ウエハ加熱（RPシリーズ）、リフター付き（PA-LIFシリーズ）材表研究・評価、無機材料熱処理、耐熱性評価、ベーキング等、RPシリーズには、両面加熱や石英製ベルジャーもオプション対応ありますので、材料のガス置換加熱にもご使用いただけます。

MSA FACTORY HEATING KNOW-HOW

素材（超耐熱プレート、熱歪対策、チタン製シャーシ）ヒータ設計、断熱、熱輻射、熱シミュレーションなど様々なノウハウを結集しております。

High performance and multifunctional

Customized lifter function (vertical substrate drive) for heating and transporting large substrates, vacuum chuck function for handling warped substrates during heating, etc. can be added.

safety

The controller is equipped with safety functions that include an over-temperature monitoring function, an emergency stop function, a leakage current detection function, and a load disconnection function.

model number	PA4040-SC	PA8010-SC	RP10008	RP10020
Max. temperature	400℃	800℃	1000℃	1000℃
Plate size	400 x 200mm	100 x 100mm	80 x 80mm	220 x 220mm
Plate Material	aluminum alloy	Super heat-resistant alloys
Supply voltage	AC200V	AC100V	AC200V
option	Electric Lifter, Vacuum suction	Electric lifter, Vacuum suction, Motorized transfer surface Shutter	Electric Lifter	Double-sided heating function
Applicable Temperature Controller	PCC100G, ETC.	PCC100G, ETC.	PCC118-W-TP
forte	Manual Insulated Cover Included, others are automatically operated The other can be handled in	Conveyor section, side exit, Transport robot compatible type	Supports ultra-high temperatures up to 1000℃, heating in an inert atmosphere of quartz glass
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