Ultra-high temperature Covered hot plate Lineup up to 1000°C

Main applications

IN ADDITION TO THE PA-LIF SERIES OF LIFTERS AND COVERED HOT PLATES FOR HEATING LARGE SUBSTRATES AND GLASS, THE RP SERIES CAN BE USED FOR WAFER HEATING (RP SERIES), MATERIAL SURFACE RESEARCH AND EVALUATION, INORGANIC MATERIAL HEAT TREATMENT, HEAT RESISTANCE EVALUATION, BAKING, ETC. THE RP SERIES HAS OPTIONS FOR DOUBLE-SIDED HEATING AND QUARTZ BELL JARS FOR GAS DISPLACEMENT HEATING OF MATERIALS. THE RP SERIES CAN ALSO BE USED FOR GAS DISPLACEMENT HEATING OF MATERIALS.

MSA FACTORY HEATING KNOW-HOW

We combine various expertise in materials (super heat-resistant plates, heat distortion countermeasures, titanium chassis) heater design, thermal insulation, thermal radiation, etc.

High performance and multifunctional

Customized lifter function (vertical substrate drive) for heating and transporting large substrates, vacuum chuck function for handling warped substrates during heating, etc. can be added.

safety

The controller is equipped with safety functions that include an over-temperature monitoring function, an emergency stop function, a leakage current detection function, and a load disconnection function.

List of models

model number	PA2560-LIF	PA4060-LIF	PA8020-LIF	RP10020
Max. temperature	250℃	400℃	800℃	1000℃
Plate Size	600 x 600mm	600 x 600mm	220 x 220mm	220 x 220mm
Plate Material	aluminum alloy		Super heat-resistant alloys
Supply voltage	AC200V
option	Electric Lifter, Vacuum suction	Electric lifter, Vacuum suction, Motorized transfer surface Shutter	Electric Lifter	Double-sided heating function
forte	Manual Insulated Cover Included, others are automatically operated The other can be handled in	Conveying section, sideways, Transfer Robot Supported types	Ultra-high temperature up to 800°C	Ultra high temperature up to 1000°C Applicable, quartz glass Heating in inert atmosphere
Temperature Controllers Controllers	PCC118-LIF-TP, Touch Panel Monitor arm type	PCC118-LIF-TP	PCC118-LIF-TP	PCC118-W-TP