Wafer Hot Chuck Size □50mm ~ □300mm, Max. temperature up to 400℃ Customized chuck lineup

Main applications

Wafer temperature characteristic test, probe mounting hot chuck, glass chuck, board electrical characteristic test

Digital Temperature Controller

Connects to MSA FACTORY standard temperature controllers with a one-touch connector. PCC100_SG

Customized chuck pattern support

Standard chucking pattern: If a workpiece is placed in the center chucking hole, the chuck can be used for any size (e.g., 6", 4", 3", and 6" or smaller for a 6" chuck). We can also customize the chuck pattern to your specifications (e.g., pick-up position, etc.).

Chuck surface Conductive/insulating/leak

The chuck surface is available in conductive specifications such as gold-plated (up to 200°C) and nickel-plated (up to 400°C), as well as insulating specifications such as alumite treatment (400°C) and alumina coating. The chuck face is equipped with a GND terminal for connection to the GND of measuring instruments, etc.

model number	PH050	PH070	PH101	PH101-TIN
Max. temperature	300℃	300℃	200℃	300℃
Plate size	30 x 40 mm	70×70mm	100 x 100mm	100 x 100mm
Plate Material	aluminum alloy
Surface Treatment	Black anodizing			SiO Deposition film
Supply voltage	AC100V
Applicable Temperature Controller	PCC100G, PCC107
forte	Minimum Size Hot chuck, Laser marking With marker	Laser Marking Markerized		SiO vapor deposition film treatment
Price (excluding tax)	-	-	-	-

model number	PH201-O	PH201-C	PH302	PH101-T
Max. temperature	200℃	200, 400°C	200℃	300℃
Plate size	4-6"	70×70mm	250×250mm	4"
Plate Material	aluminum alloy
Surface Treatment	Black anodizing	Gold plating	Black anodizing	Gold plating
Supply voltage	AC100V
Applicable Temperature Controller	PCC100G, PCC107
forte	Mechanical Clamps Vacuum Chuck	Gold plating treatment, Hot plate section Insulation treatment, air cooling (using compressed air) Features of the Hot Plate		Mechanical With clamp function, Gold plated, Hot plate Insulation on hot plate
Price (excluding tax)	-	-	-	-