Vacuum heating furnace/drying furnace chamber PH225 maximum temperature 700℃

Main applications

Vacuum Heating Processes The PCC118-HVMJ can be used as a vacuum baker, vacuum dryer, or VCD. The color touch panel temperature controller / PCC118-HVMJ enables easy operation of the vacuum heating process.

MSA FACTORY HEATING KNOW-HOW

We combine various know-how such as heater design, thermal insulation, and thermal radiation. The software is also highly functional.

Simple main unit + abundant options for a variety of applications

A simple main unit and controller enable the construction of high-temperature and vacuum processes. A wide variety of options and customization options allow you to build a model that is best suited for your company.

Main options/all customizable

Workpiece support: proximity pins, positioning pins, lifter function

Gas flow: O2, H2 (mixed gas), others (N2 gas is standard specification)

Measurement functions: O2 concentration system, dew point meter, and Pirani vacuum gauge are standard specifications.

Observation window: Heat-resistant glass, quartz glass (wide aperture type: quartz glass only)

Long-time, high-temperature operation: Water-cooling unit

Volatile material handling: Cooling trap unit, vacuum flexible tube heater added

Pressure and flow control: Mass flow control, conductance valve vacuum pressure control, slow evacuation, slow bend

Workpiece transfer: Wafer transfer unit

Sub-chamber: Load lock type wafer transfer unit

Option list is here PH224_225_OP1 *Please contact us for other options.
PH225 catalog is here PH225 catalog (English version PH225_EN)

high efficiency

Uniform heating is possible because of hot plate heating. The workpiece processing time is shorter than any other vacuum dryer, and we invite you to compare the time required with conventional processes.

Long-time heating/ultra-high temperature vacuum heating

Supports heating processes exceeding one hour and ultra-high temperatures (800°C). To support long-term workpieces, a water-cooling function (optional), chiller and circulating cooling water are required separately.

safety

The controller is equipped with safety functions that include an over-temperature monitoring function, an emergency stop function, a leakage current detection function, and a load disconnection function.

List of models

model number	PH225-5415	PH225-1202	PH225-250	PH225-2002
Max. temperature	150℃	200℃	200℃	400℃
degree of vacuum	Approximately 20Pa
Plate size	550×400mm	120 x 120mm	φ240mm	200 x 200mm
Plate Material	aluminum alloy
Supply voltage	AC200V	AC200 OR 100V	AC200V	AC200V OR 100V
Applicable Temperature Controller	PCC118HV-TP
controller
option	Oxygen concentration meter, temperature monitor sensor, Dew point meter, pressure control, Exhaust traps (for low melting point materials), etc.

List of models

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model number	PH225-2403	PH225-3304	PH225-2406	PH225-2407
Max. temperature	300℃	400℃	600℃	700℃
degree of vacuum	Approximately 20Pa
Plate size	φ240mm	φ330mm		φ240mm
Plate Material	aluminum alloy		Inconel alloy
Supply voltage	AC200V
Applicable Temperature Controller	PCC118HV-TP
controller
option	Oxygen concentration meter, temperature monitor sensor, Dew point meter, pressure control, Exhaust traps (for low melting point materials), etc.