Thin, adsorption stage

Adsorption stage

Adsorption method

Through-hole: Suction holes are placed at the suction points, and the negative pressure of the vacuum pump is used to suction the workpiece. This is the most powerful suction method.

V-shaped hole: From the center through-hole, a single stroke V-shaped hole can be negatively pressurized to enable suction independent of the workpiece size. This is a suitable chucking method when multiple workpiece sizes need to be handled.

Porous ceramic: When the workpiece is extremely thin (e.g., glass, film-like, with holes, etc.), this chucking method does not cause any deformation to the workpiece.

For through-hole and porous ceramic adsorption, the workpiece size and stage size (adsorption area size) must be matched.

MULTI-AXIS CONFIGURATION MSA-MULTI-STAGE

MSA MULTI-STAGE (MULTI-AXIS CUSTOMIZED) STAGES COMBINED WITH OTHER AXIS-DRIVEN STAGES, WE CAN PREPARE A STAGE TO SUIT YOUR APPLICATION.

Model list THV series (Workpiece pick-up and chuck stage)