Thin, adsorption stage

Adsorption stage

Adsorption method

Through-hole: Suction holes are placed at the suction points, and the negative pressure of the vacuum pump is used to suction the workpiece. This is the most powerful suction method.

V-shaped hole: From the center through-hole, a single stroke V-shaped hole can be negatively pressurized to enable suction independent of the workpiece size. This is a suitable chucking method when multiple workpiece sizes need to be handled.

Porous ceramic: If the workpiece is extremely thin (e.g., glass, film-like, with a slot, hole, etc.), this chucking method does not cause deformation to the workpiece.

For through-hole and porous ceramic adsorption, the workpiece size and stage size (adsorption area size) must be matched.

Heat-resistant specifications and compatibility

Standard temperature is 200°C. Heat-resistant specifications up to 500°C are also available upon special order. The maximum temperature varies depending on the size and adsorption method.

Custom Shape

Customized holes for positioning pins, holes for fixing to other stages, etc. are available.

Controller for vacuum suction

A suction controller is also provided. The controller controls suction ON/OFF, suction pressure, vacuum pump ON/OFF, ejector, and other operations at hand.

MULTI-AXIS CONFIGURATION MSA-MULTI-STAGE

MSA MULTI-STAGE (MULTI-AXIS CUSTOMIZED) STAGES COMBINED WITH OTHER AXIS-DRIVEN STAGES, WE CAN PREPARE A STAGE TO SUIT YOUR APPLICATION.

Model list ① THV series suction surface square type (workpiece suction/chuck stage)

Model List (2) THV Series: Suction surface type 0 (Workpiece suction/chuck stage)