ウエハホットチャック　サイズ　４”／６”ウエハ対応　　最高温度　200℃まで　のスタンダードウエハチャック

Main applications

Wafer temperature characteristic test, probe mounting hot chuck, glass chuck, board electrical characteristic test

Digital Temperature Controller

Connects to MSA Factory standard temperature controller with one-touch connector. High-precision temperature control can be performed immediately with simple operation. C100_SG

Universal zipper pattern

Standard suction pattern: If you place the workpiece in the central suction hole, the size is universal. For example, if the chuck is 6", it can be used with any size under 6", 4", 3".

Chuck surface Conductive/insulating/leak

The chuck surface is available in two types: gold-plated (200°C) conductive and anodized (200°C) insulating.

List of models

model number	PH201-K-04	PH201-S-04	PH201-K-06	PH201-S-06
Max. temperature	200℃	200℃	200℃	200℃
Plate size	4"		6”
Plate Material	aluminum alloy
Surface Treatment	金メッキ	黒アルマイト	金メッキ	黒アルマイト
Supply voltage	AC100V
option	プローバ取付用アダプタ（カスタマイズ対応）
Applicable Temperature Controller	PCC100G、PCC107
forte	標準構成
Price (excluding tax)	-	-	-	-