Hot Chuck / WaferHotChack PH20 series All products Image display
| WAFER HOT CHUCK PH201 SERIES | PH201S-06, K-06, S-04, K-04 for 4" and 6" wafers |
|---|---|
| WEAR HOT CHUCK PH-X01 SERIES | PH050, PH070, PH101, PH101-TIN, PH201C, PH302 50mm, 100mm, 200mm, 300mm supported |
| FILM HOT CHUCK PA20XX-FC | PA2012-FC, PA2012-WPFC, PA2020-FC, PA2020-WPFC Porous ceramic hot adsorption |
| Hot chuck with lifter and cover | With lifter and cover door for large substrates and large glass substrates |
| COLD AND HOT WAFER CHUCK PJ SERIES | Hot chuck with cooling function Hot plate |