wet process
Standard Stock Teflon Carrier | Standard Stock STF Series CatalogSTF Series Specification Drawings |
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Wafer Glass Carrier General Catalog | General Catalog of Cleaning Jigs |
Quartz carrier | Quartz Carrier CatalogSGF Series Specification Chart |
Conversion Carrier | Conversion Carrier |
stage
Manual and Automatic Stages General Catalog |
Stage General Catalog |
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RXY STAGE | RXY250/300 SPECIFICATION CHART |
IXY STAGE | IXY Stage CatalogIXY125-150 Specifications |
SXY STAGE | SXY100~175 specification drawingSXY200/250/300 specification drawing |
SHXY STAGE | SHXY Standard Product Specification DrawingSHXY Functional Specification DrawingSHXY DXF |
Angle Stage AG Series (Standard stock) |
AG Series CatalogAG Standard SpecificationsAG Series DXF |
MULTI-AXIS MANUAL XY STAGE | Multi-axis Manual Stages Catalog4 axis Stages Specifications4 axis Stages DXF |
Microscope Stand | Microscope Stand Catalog |
hot plate
Temperature Control Equipment General Catalog | Temperature Control Equipment Catalog |
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100°C to 250°C | PA20 Series CatalogPA20 Series Specification DrawingPA20 Series DXFPA2025Em STEP |
300°C to 400°C | PA30/40 Series CatalogPA30/40 series CatalogPA30/40 Series SpecificationsPA30/40 series DXFPA30/40 series STEP. |
600℃ | PA60 Series CatalogPA60 Series SpecificationsPA60 Series DXF |
800°C to 1000°C | Super High Temperature Hot Plate CatalogSuper High Temperature Series Catalog |
With lifter | Catalog with lifters |
Waterproof Hot Plate | Waterproof Specification Catalog |
heat block | Heat Block Catalog |
Nitrogen atmosphere | Nitrogen Atmosphere Catalog |
Large Hot Plate | Large Hot Plate Catalog |
Small Hot Plate | Small Hot Plate General CatalogSmall Hot Plate CatalogSmall Hot Plate Specifications (PH121)Small Hot Plate Specifications DXFSmall Hot Plate Specification drawing (PH200) |
Heating equipment
heating furnace | Heating Furnace Catalog |
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hot press
General Catalog | Hot Press General Catalog |
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Digital Servo Presses | Digital Servo Press Catalog |
Hot Hand Press | Hot Hand Press Catalog |
Temperature chamber
General Catalog | Temperature Chamber General Catalog |
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Ultra-compact, table-top constant-temperature chamber | Ultra-compact, table-top installation type catalog |
Peltier temperature chamber | Peltier Type Catalog |
Vacuum Control
Vacuum heating furnace / Drying furnace | PH225 CatalogPH225 ENPH224 |
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Wafer heating
Wafer Hot Chuck | Wafer Hot Chuck |
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Wafer hot chuck (heating and cooling) | Wafer chuck (heating and cooling) |
Film Hot Chuck | Film Hot Chuck |
Analytical heating
PN SERIES | PN121/131catalog PN121/131catalog(Eng.)PN121/131specification drawingPN121D specification drawing |
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MEMS DEVICES
Custom chip trays | Chip Tray Catalog |
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Laminated Metal Chip Trays | Laminated Chip Tray Catalog |
Substrate warpage evaluation jig | Boardwarpage evaluationjig catalogBoard warpage evaluation jig specification chart |
Temperature Controller
Temperature Controller | Controller General Catalog |
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